A.P. Eremin, V.D. Smoljaninov, V.V. Constantinov, A.M. Filachev
Research Institute for Electron and Ion Optics, Moscow, Russia
Offered technological Line of continuous action for deposition mono- or multiplier coatings of metals and then oxides or nitrides and also thin films high denser of silicon, nitride silicon, oxide magnum and other materials on large-sized flat substrates is inteded for issue of glass, flat highly information of color screen and other products.