Microwave plasma-assisted synthesis of polycrystalline diamond layers on thin silicon wafers of large diameter
The authors: V. S. Sedov, A. K. Martyanov, A. S. Altakhov, M. Yu. Shevchenko, E. V. Zavedeev, M. L. Zanaveskin, V. G. Ralchenko, V. I. Konov
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