I. S. Makarowa
Research Institute for Electron and Ion Optics, Moscow, Russia
B. N. Vasichev, M. O. Zotova
Moscow Institute for Electronics and Mathematics (Technical University), Moscow, Russia
A. M. Filachev
State Scientific Center “Orion”, Moscow, Russia
The methods and program product for the calculation of magnetic electron lens aberration, caused by the unprecision of fabrication and alignment of pole pieces are presented. The influence of channel ellipticity and the relative shift of channel in pole pieces on aberration coefficients and radiuses of aberration circle of dispersion are estimated.