V. A. Fedirko
Moscow State University of technology “Stankin”
Yu. N. Karamzin, S. V. Polyakov, and I.G. Zakharova
Institute for Mathematical Modelling RAN
Two-dimensional quasi-hydrodynamic model of hot electron field emission from silicon microcathode is developed. An original numerical method is suggested which ensures the conservatism and the weak monotony of a finite difference decision. The steady-state of the emitting cathode have been simulated. The results are essential for the vacuum microelectronics technology of effective silicon field emitter arrays.